Type |
Size |
Diagonal |
Dia.-Thick Ratio |
Surface Quality S/D |
FlatnessPV@632.8nm |
Roughness RMS |
Parallelism |
Square |
Small |
10-25mm |
10:1 |
5-1 |
0.05λ |
≤0.1nm |
10″ |
Medium |
25-100mm |
10:1 |
10-5 |
0.05λ |
≤0.1nm |
10″ |
|
Large |
100-295mm |
10:1 |
20-10 |
0.05λ/φ100 |
≤0.1nm |
3″ |
|
Type |
Size |
Diameter |
Dia.-Thick Ratio |
Surface Quality S/D |
FlatnessPV@632.8nm |
Roughness RMS |
Parallelism |
Circular |
Small |
φ10-φ25mm |
10:1 |
5-1 |
0.05λ |
≤0.1nm |
10″ |
Medium |
φ25-φ100mm |
10:1 |
10-5 |
0.05λ |
≤0.1nm |
10″ |
|
Large |
φ100-φ295mm |
10:1 |
20-10 |
0.05λ/φ100 |
≤0.1nm |
3″ |
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